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PID for Vacuum System Automation

Posted by Tom Bassi on Dec 12, 2014 5:55:00 PM

PID is an acronym for using a closed loop feedback system with the terms Proportional, Integral and Derivative.  While it uses calculus-type words, it is straightforward to configure and is what many industrial processes rely on for predictable automation.  It works on the principal of minimizing the error between the current vacuum reading and the desired set point vacuum pressure.   While PID can work on any closed system, it is also very useful for vacuum systems.  The balancing act is tuning
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Topics: Vessel Downtime, Manufacturing, Calibration, Semiconductor, Surface Treatment, Food/Beverage

Working With Multiple Ranges of Vacuum in the Semiconductor Industry

Posted by Tim Collins on Oct 9, 2014 8:30:00 AM

If you are managing a vacuum process in the Semiconductor industry, you need the accuracy and isolation of several capacitance manometers, optimally all in one reading, but often have to look at several confusing displays. When dealing with 4 or more decades of vacuum, single readings are difficult to interpret, time consuming and frustrating!  A solution to this problem is
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Topics: Semiconductor

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